Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor

Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor

10.1109/TED.2006.883677

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Bibliographic Details
Main Authors: Xiong, Y.-Z., Yu, M.-B., Lo, G.-Q., Li, M.-F., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Backend intermetal dielectric (IMD)
High κ
Metal-insulator-metal (MIM)
Modeling
On-chip capacitor
Resonant frequency
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83111
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83111

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