Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor

10.1109/TED.2006.883677

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Bibliographic Details
Main Authors:	Xiong, Y.-Z., Yu, M.-B., Lo, G.-Q., Li, M.-F., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Backend intermetal dielectric (IMD) High κ Metal-insulator-metal (MIM) Modeling On-chip capacitor Resonant frequency
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83111
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83111
record_format	dspace
spelling	sg-nus-scholar.10635-831112023-10-29T20:22:59Z Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor Xiong, Y.-Z. Yu, M.-B. Lo, G.-Q. Li, M.-F. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Backend intermetal dielectric (IMD) High κ Metal-insulator-metal (MIM) Modeling On-chip capacitor Resonant frequency 10.1109/TED.2006.883677 IEEE Transactions on Electron Devices 53 11 2839-2842 IETDA 2014-10-07T04:37:24Z 2014-10-07T04:37:24Z 2006-11 Article Xiong, Y.-Z., Yu, M.-B., Lo, G.-Q., Li, M.-F., Kwong, D.-L. (2006-11). Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor. IEEE Transactions on Electron Devices 53 (11) : 2839-2842. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2006.883677 00189383 http://scholarbank.nus.edu.sg/handle/10635/83111 000241805300024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Backend intermetal dielectric (IMD) High κ Metal-insulator-metal (MIM) Modeling On-chip capacitor Resonant frequency
spellingShingle	Backend intermetal dielectric (IMD) High κ Metal-insulator-metal (MIM) Modeling On-chip capacitor Resonant frequency Xiong, Y.-Z. Yu, M.-B. Lo, G.-Q. Li, M.-F. Kwong, D.-L. Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor
description	10.1109/TED.2006.883677
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Xiong, Y.-Z. Yu, M.-B. Lo, G.-Q. Li, M.-F. Kwong, D.-L.
format	Article
author	Xiong, Y.-Z. Yu, M.-B. Lo, G.-Q. Li, M.-F. Kwong, D.-L.
author_sort	Xiong, Y.-Z.
title	Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor
title_short	Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor
title_full	Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor
title_fullStr	Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor
title_full_unstemmed	Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor
title_sort	substrate effects on resonant frequency of silicon-based rf on-chip mim capacitor
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83111
_version_	1781784304730243072

Substrate effects on resonant frequency of silicon-based RF on-chip MIM capacitor

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