Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale

10.1186/1556-276X-8-506

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Bibliographic Details
Main Authors:	Ho, J.-W., Wee, Q., Dumond, J., Tay, A., Chua, S.-J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Metal-catalyzed electroless etching Non-porous Si nanostructures Step-and-repeat nanoimprint lithography Sub-50-nm resolution User-defined patterns Wafer scale
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83256
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83256
record_format	dspace
spelling	sg-nus-scholar.10635-832562023-10-29T20:28:42Z Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale Ho, J.-W. Wee, Q. Dumond, J. Tay, A. Chua, S.-J. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Metal-catalyzed electroless etching Non-porous Si nanostructures Step-and-repeat nanoimprint lithography Sub-50-nm resolution User-defined patterns Wafer scale 10.1186/1556-276X-8-506 Nanoscale Research Letters 8 1 1-10 2014-10-07T04:39:08Z 2014-10-07T04:39:08Z 2013 Article Ho, J.-W., Wee, Q., Dumond, J., Tay, A., Chua, S.-J. (2013). Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale. Nanoscale Research Letters 8 (1) : 1-10. ScholarBank@NUS Repository. https://doi.org/10.1186/1556-276X-8-506 19317573 http://scholarbank.nus.edu.sg/handle/10635/83256 000328353000001 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Metal-catalyzed electroless etching Non-porous Si nanostructures Step-and-repeat nanoimprint lithography Sub-50-nm resolution User-defined patterns Wafer scale
spellingShingle	Metal-catalyzed electroless etching Non-porous Si nanostructures Step-and-repeat nanoimprint lithography Sub-50-nm resolution User-defined patterns Wafer scale Ho, J.-W. Wee, Q. Dumond, J. Tay, A. Chua, S.-J. Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
description	10.1186/1556-276X-8-506
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ho, J.-W. Wee, Q. Dumond, J. Tay, A. Chua, S.-J.
format	Article
author	Ho, J.-W. Wee, Q. Dumond, J. Tay, A. Chua, S.-J.
author_sort	Ho, J.-W.
title	Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
title_short	Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
title_full	Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
title_fullStr	Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
title_full_unstemmed	Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale
title_sort	versatile pattern generation of periodic, high aspect ratio si nanostructure arrays with sub-50-nm resolution on a wafer scale
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83256
_version_	1781784343909236736

Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale

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