A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators
10.1016/j.proche.2009.07.325
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2014
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sg-nus-scholar.10635-833192024-11-13T15:04:25Z A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator PZT Scanning mirror 10.1016/j.proche.2009.07.325 Procedia Chemistry 1 1 1303-1306 2014-10-07T04:39:54Z 2014-10-07T04:39:54Z 2009-09 Conference Paper Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325 18766196 http://scholarbank.nus.edu.sg/handle/10635/83319 000275995600108 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator PZT Scanning mirror |
| spellingShingle |
Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator PZT Scanning mirror Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators |
| description |
10.1016/j.proche.2009.07.325 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. |
| format |
Conference or Workshop Item |
| author |
Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. |
| author_sort |
Koh, K.H. |
| title |
A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators |
| title_short |
A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators |
| title_full |
A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators |
| title_fullStr |
A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators |
| title_full_unstemmed |
A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators |
| title_sort |
2-d mems scanning mirror using piezoelectric pzt beam actuators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83319 |
| _version_ |
1821223678318215168 |