A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement
10.1109/VLSIT.2008.4588550
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2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83390 |
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sg-nus-scholar.10635-833902015-01-08T05:36:54Z A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement Liu, F. Wong, H.-S. Ang, K.-W. Zhu, M. Wang, X. Lai, D.M.-Y. Lim, P.-C. Tan, B.L.H. Tripathy, S. Oh, S.-A. Samudra, G.S. Balasubramanian, N. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/VLSIT.2008.4588550 Digest of Technical Papers - Symposium on VLSI Technology 26-27 DTPTE 2014-10-07T04:40:41Z 2014-10-07T04:40:41Z 2008 Conference Paper Liu, F.,Wong, H.-S.,Ang, K.-W.,Zhu, M.,Wang, X.,Lai, D.M.-Y.,Lim, P.-C.,Tan, B.L.H.,Tripathy, S.,Oh, S.-A.,Samudra, G.S.,Balasubramanian, N.,Yeo, Y.-C. (2008). A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement. Digest of Technical Papers - Symposium on VLSI Technology : 26-27. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/VLSIT.2008.4588550" target="_blank">https://doi.org/10.1109/VLSIT.2008.4588550</a> 9781424418053 07431562 http://scholarbank.nus.edu.sg/handle/10635/83390 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
10.1109/VLSIT.2008.4588550 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Liu, F. Wong, H.-S. Ang, K.-W. Zhu, M. Wang, X. Lai, D.M.-Y. Lim, P.-C. Tan, B.L.H. Tripathy, S. Oh, S.-A. Samudra, G.S. Balasubramanian, N. Yeo, Y.-C. |
| format |
Conference or Workshop Item |
| author |
Liu, F. Wong, H.-S. Ang, K.-W. Zhu, M. Wang, X. Lai, D.M.-Y. Lim, P.-C. Tan, B.L.H. Tripathy, S. Oh, S.-A. Samudra, G.S. Balasubramanian, N. Yeo, Y.-C. |
| spellingShingle |
Liu, F. Wong, H.-S. Ang, K.-W. Zhu, M. Wang, X. Lai, D.M.-Y. Lim, P.-C. Tan, B.L.H. Tripathy, S. Oh, S.-A. Samudra, G.S. Balasubramanian, N. Yeo, Y.-C. A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement |
| author_sort |
Liu, F. |
| title |
A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement |
| title_short |
A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement |
| title_full |
A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement |
| title_fullStr |
A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement |
| title_full_unstemmed |
A new source/drain germanium-enrichment process comprising Ge deposition and laser-induced local melting and recrystallization for P-FET performance enhancement |
| title_sort |
new source/drain germanium-enrichment process comprising ge deposition and laser-induced local melting and recrystallization for p-fet performance enhancement |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83390 |
| _version_ |
1681089427090178048 |