Carbon- and tin- Incorporated source/drain stressors for CMOS transistors
10.1149/1.2986751
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83527 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-83527 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-835272024-11-08T16:45:23Z Carbon- and tin- Incorporated source/drain stressors for CMOS transistors Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2986751 ECS Transactions 16 10 39-46 2014-10-07T04:42:13Z 2014-10-07T04:42:13Z 2008 Conference Paper Yeo, Y.-C. (2008). Carbon- and tin- Incorporated source/drain stressors for CMOS transistors. ECS Transactions 16 (10) : 39-46. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2986751 9781566776561 19385862 http://scholarbank.nus.edu.sg/handle/10635/83527 000273336700004 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
10.1149/1.2986751 |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Yeo, Y.-C. |
format |
Conference or Workshop Item |
author |
Yeo, Y.-C. |
spellingShingle |
Yeo, Y.-C. Carbon- and tin- Incorporated source/drain stressors for CMOS transistors |
author_sort |
Yeo, Y.-C. |
title |
Carbon- and tin- Incorporated source/drain stressors for CMOS transistors |
title_short |
Carbon- and tin- Incorporated source/drain stressors for CMOS transistors |
title_full |
Carbon- and tin- Incorporated source/drain stressors for CMOS transistors |
title_fullStr |
Carbon- and tin- Incorporated source/drain stressors for CMOS transistors |
title_full_unstemmed |
Carbon- and tin- Incorporated source/drain stressors for CMOS transistors |
title_sort |
carbon- and tin- incorporated source/drain stressors for cmos transistors |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/83527 |
_version_ |
1821199483312013312 |