Carbon- and tin- Incorporated source/drain stressors for CMOS transistors
10.1149/1.2986751
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Main Author: | Yeo, Y.-C. |
---|---|
Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83527 |
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Institution: | National University of Singapore |
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