Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors

• Main Authors: Lee, R.T.P., Yang, L.-T., Ang, K.-W., Liow, T.-Y., Tan, K.-M., Wong, A.S.-W., Samudra, G.S., Chi, D.-Z., Yeo, Y.-C.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/83938

Materials Research Society Symposium Proceedings