Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors
Materials Research Society Symposium Proceedings
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2014
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sg-nus-scholar.10635-839382015-01-07T06:26:59Z Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors Lee, R.T.P. Yang, L.-T. Ang, K.-W. Liow, T.-Y. Tan, K.-M. Wong, A.S.-W. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium Proceedings 995 61-66 MRSPD 2014-10-07T04:46:56Z 2014-10-07T04:46:56Z 2007 Conference Paper Lee, R.T.P.,Yang, L.-T.,Ang, K.-W.,Liow, T.-Y.,Tan, K.-M.,Wong, A.S.-W.,Samudra, G.S.,Chi, D.-Z.,Yeo, Y.-C. (2007). Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors. Materials Research Society Symposium Proceedings 995 : 61-66. ScholarBank@NUS Repository. 9781605604275 02729172 http://scholarbank.nus.edu.sg/handle/10635/83938 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
| country |
Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium Proceedings |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Lee, R.T.P. Yang, L.-T. Ang, K.-W. Liow, T.-Y. Tan, K.-M. Wong, A.S.-W. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C. |
| format |
Conference or Workshop Item |
| author |
Lee, R.T.P. Yang, L.-T. Ang, K.-W. Liow, T.-Y. Tan, K.-M. Wong, A.S.-W. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C. |
| spellingShingle |
Lee, R.T.P. Yang, L.-T. Ang, K.-W. Liow, T.-Y. Tan, K.-M. Wong, A.S.-W. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C. Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| author_sort |
Lee, R.T.P. |
| title |
Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| title_short |
Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| title_full |
Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| title_fullStr |
Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| title_full_unstemmed |
Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| title_sort |
material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83938 |
| _version_ |
1681089527524884480 |