Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors

• Main Authors: Lee, R.T.P., Yang, L.-T., Ang, K.-W., Liow, T.-Y., Tan, K.-M., Wong, A.S.-W., Samudra, G.S., Chi, D.-Z., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83938
• Institution: National University of Singapore

Materials Research Society Symposium Proceedings