Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors

Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors

Materials Research Society Symposium Proceedings

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書目詳細資料
Main Authors:	Lee, R.T.P., Yang, L.-T., Ang, K.-W., Liow, T.-Y., Tan, K.-M., Wong, A.S.-W., Samudra, G.S., Chi, D.-Z., Yeo, Y.-C.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/83938
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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