Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors

Material and electrical characterization of nickel silicide-carbon as contact metal to silicon-carbon source and drain stressors

Materials Research Society Symposium Proceedings

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Bibliographic Details
Main Authors:	Lee, R.T.P., Yang, L.-T., Ang, K.-W., Liow, T.-Y., Tan, K.-M., Wong, A.S.-W., Samudra, G.S., Chi, D.-Z., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83938
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Institution:	National University of Singapore

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