Characterization of modified surface of indium tin oxide film during process of laser patterning

Characterization of modified surface of indium tin oxide film during process of laser patterning

10.1117/12.456855

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Bibliographic Details
Main Authors: Zeng, J.N., Koh, H.L., Ren, Z.M., Song, W.D., Lu, Y.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Indium-Tin-Oxide
KrF excimer laser patterning
Micro-Raman
Optical transmission
XPS
XRD
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83541
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Institution: National University of Singapore
Description
Summary:10.1117/12.456855

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