Characterization of modified surface of indium tin oxide film during process of laser patterning
10.1117/12.456855
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2014
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sg-nus-scholar.10635-835412023-10-27T08:01:50Z Characterization of modified surface of indium tin oxide film during process of laser patterning Zeng, J.N. Koh, H.L. Ren, Z.M. Song, W.D. Lu, Y.F. ELECTRICAL & COMPUTER ENGINEERING DATA STORAGE INSTITUTE Indium-Tin-Oxide KrF excimer laser patterning Micro-Raman Optical transmission XPS XRD 10.1117/12.456855 Proceedings of SPIE - The International Society for Optical Engineering 4426 268-271 PSISD 2014-10-07T04:42:23Z 2014-10-07T04:42:23Z 2002 Conference Paper Zeng, J.N., Koh, H.L., Ren, Z.M., Song, W.D., Lu, Y.F. (2002). Characterization of modified surface of indium tin oxide film during process of laser patterning. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 268-271. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456855 0277786X http://scholarbank.nus.edu.sg/handle/10635/83541 000176422100060 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Indium-Tin-Oxide KrF excimer laser patterning Micro-Raman Optical transmission XPS XRD |
| spellingShingle |
Indium-Tin-Oxide KrF excimer laser patterning Micro-Raman Optical transmission XPS XRD Zeng, J.N. Koh, H.L. Ren, Z.M. Song, W.D. Lu, Y.F. Characterization of modified surface of indium tin oxide film during process of laser patterning |
| description |
10.1117/12.456855 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Zeng, J.N. Koh, H.L. Ren, Z.M. Song, W.D. Lu, Y.F. |
| format |
Conference or Workshop Item |
| author |
Zeng, J.N. Koh, H.L. Ren, Z.M. Song, W.D. Lu, Y.F. |
| author_sort |
Zeng, J.N. |
| title |
Characterization of modified surface of indium tin oxide film during process of laser patterning |
| title_short |
Characterization of modified surface of indium tin oxide film during process of laser patterning |
| title_full |
Characterization of modified surface of indium tin oxide film during process of laser patterning |
| title_fullStr |
Characterization of modified surface of indium tin oxide film during process of laser patterning |
| title_full_unstemmed |
Characterization of modified surface of indium tin oxide film during process of laser patterning |
| title_sort |
characterization of modified surface of indium tin oxide film during process of laser patterning |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83541 |
| _version_ |
1781784365758414848 |