Characterization of ultrashallow dopant profiles using spreading resistance profiling

10.1116/1.1426370

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Bibliographic Details
Main Authors:	Tan, L.S., Tan, L.C.P., Leong, M.S., Mazur, R.G., Ye, C.W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83545
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83545
record_format	dspace
spelling	sg-nus-scholar.10635-835452023-10-30T07:14:11Z Characterization of ultrashallow dopant profiles using spreading resistance profiling Tan, L.S. Tan, L.C.P. Leong, M.S. Mazur, R.G. Ye, C.W. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1426370 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 1 483-487 JVTBD 2014-10-07T04:42:25Z 2014-10-07T04:42:25Z 2002-01 Conference Paper Tan, L.S., Tan, L.C.P., Leong, M.S., Mazur, R.G., Ye, C.W. (2002-01). Characterization of ultrashallow dopant profiles using spreading resistance profiling. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 (1) : 483-487. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1426370 10711023 http://scholarbank.nus.edu.sg/handle/10635/83545 000173985500090 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1426370
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, L.S. Tan, L.C.P. Leong, M.S. Mazur, R.G. Ye, C.W.
format	Conference or Workshop Item
author	Tan, L.S. Tan, L.C.P. Leong, M.S. Mazur, R.G. Ye, C.W.
spellingShingle	Tan, L.S. Tan, L.C.P. Leong, M.S. Mazur, R.G. Ye, C.W. Characterization of ultrashallow dopant profiles using spreading resistance profiling
author_sort	Tan, L.S.
title	Characterization of ultrashallow dopant profiles using spreading resistance profiling
title_short	Characterization of ultrashallow dopant profiles using spreading resistance profiling
title_full	Characterization of ultrashallow dopant profiles using spreading resistance profiling
title_fullStr	Characterization of ultrashallow dopant profiles using spreading resistance profiling
title_full_unstemmed	Characterization of ultrashallow dopant profiles using spreading resistance profiling
title_sort	characterization of ultrashallow dopant profiles using spreading resistance profiling
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83545
_version_	1781784366319403008

Characterization of ultrashallow dopant profiles using spreading resistance profiling

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