Controllable periodic structures on silicon wafer by CO2 laser irradiation
10.1016/S0169-4332(01)00693-6
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2014
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sg-nus-scholar.10635-835852023-10-30T07:22:20Z Controllable periodic structures on silicon wafer by CO2 laser irradiation Wang, W.J. Lu, Y.F. An, C.W. Hong, M.H. Chong, T.C. DATA STORAGE INSTITUTE ELECTRICAL & COMPUTER ENGINEERING Energy bandgap LIPSS effect Orientation Thermal capillary wave effect 10.1016/S0169-4332(01)00693-6 Applied Surface Science 186 1-4 594-598 ASUSE 2014-10-07T04:42:52Z 2014-10-07T04:42:52Z 2002-01-28 Conference Paper Wang, W.J., Lu, Y.F., An, C.W., Hong, M.H., Chong, T.C. (2002-01-28). Controllable periodic structures on silicon wafer by CO2 laser irradiation. Applied Surface Science 186 (1-4) : 594-598. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(01)00693-6 01694332 http://scholarbank.nus.edu.sg/handle/10635/83585 000174732100105 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
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Energy bandgap LIPSS effect Orientation Thermal capillary wave effect |
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Energy bandgap LIPSS effect Orientation Thermal capillary wave effect Wang, W.J. Lu, Y.F. An, C.W. Hong, M.H. Chong, T.C. Controllable periodic structures on silicon wafer by CO2 laser irradiation |
| description |
10.1016/S0169-4332(01)00693-6 |
| author2 |
DATA STORAGE INSTITUTE |
| author_facet |
DATA STORAGE INSTITUTE Wang, W.J. Lu, Y.F. An, C.W. Hong, M.H. Chong, T.C. |
| format |
Conference or Workshop Item |
| author |
Wang, W.J. Lu, Y.F. An, C.W. Hong, M.H. Chong, T.C. |
| author_sort |
Wang, W.J. |
| title |
Controllable periodic structures on silicon wafer by CO2 laser irradiation |
| title_short |
Controllable periodic structures on silicon wafer by CO2 laser irradiation |
| title_full |
Controllable periodic structures on silicon wafer by CO2 laser irradiation |
| title_fullStr |
Controllable periodic structures on silicon wafer by CO2 laser irradiation |
| title_full_unstemmed |
Controllable periodic structures on silicon wafer by CO2 laser irradiation |
| title_sort |
controllable periodic structures on silicon wafer by co2 laser irradiation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83585 |
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1781784370278825984 |