Controllable periodic structures on silicon wafer by CO2 laser irradiation

10.1016/S0169-4332(01)00693-6

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Bibliographic Details
Main Authors: Wang, W.J., Lu, Y.F., An, C.W., Hong, M.H., Chong, T.C.
Other Authors: DATA STORAGE INSTITUTE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83585
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Institution: National University of Singapore
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