Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

10.1109/TRANSDUCERS.2011.5969824

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Bibliographic Details
Main Authors:	Annamalai, M., Mathew, S., Viswanathan, V., Fang, C., Pickard, D.S., Palaniapan, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Graphene Helium Ion Microscope nanomechanical structure
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83621
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83621
record_format	dspace
spelling	sg-nus-scholar.10635-836212015-01-12T06:34:49Z Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications Annamalai, M. Mathew, S. Viswanathan, V. Fang, C. Pickard, D.S. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING Graphene Helium Ion Microscope nanomechanical structure 10.1109/TRANSDUCERS.2011.5969824 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 2578-2581 2014-10-07T04:43:16Z 2014-10-07T04:43:16Z 2011 Conference Paper Annamalai, M.,Mathew, S.,Viswanathan, V.,Fang, C.,Pickard, D.S.,Palaniapan, M. (2011). Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 2578-2581. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/TRANSDUCERS.2011.5969824" target="_blank">https://doi.org/10.1109/TRANSDUCERS.2011.5969824</a> 9781457701573 http://scholarbank.nus.edu.sg/handle/10635/83621 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Graphene Helium Ion Microscope nanomechanical structure
spellingShingle	Graphene Helium Ion Microscope nanomechanical structure Annamalai, M. Mathew, S. Viswanathan, V. Fang, C. Pickard, D.S. Palaniapan, M. Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications
description	10.1109/TRANSDUCERS.2011.5969824
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Annamalai, M. Mathew, S. Viswanathan, V. Fang, C. Pickard, D.S. Palaniapan, M.
format	Conference or Workshop Item
author	Annamalai, M. Mathew, S. Viswanathan, V. Fang, C. Pickard, D.S. Palaniapan, M.
author_sort	Annamalai, M.
title	Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications
title_short	Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications
title_full	Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications
title_fullStr	Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications
title_full_unstemmed	Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications
title_sort	design, fabrication and helium ion microscope patterning of suspended nanomechanical graphene structures for nems applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83621
_version_	1681089469662363648

Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

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