Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

10.1109/TRANSDUCERS.2011.5969824

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Bibliographic Details
Main Authors: Annamalai, M., Mathew, S., Viswanathan, V., Fang, C., Pickard, D.S., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Graphene
Helium Ion Microscope
nanomechanical structure
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83621
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83621

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