Doping dependence of optical properties of solid-phase crystallized evaporated poly-Si thin films on glass

Doping dependence of optical properties of solid-phase crystallized evaporated poly-Si thin films on glass

10.1109/COMMAD.2008.4802150

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Bibliographic Details
Main Authors: He, S., Sproul, A.B., Aberle, A.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Absorption coefficient
Boron, phosphorous
Evaporated poly-si films
Refractive index
Solid phase crystallization
Tauc-lorentz model
Thin films
WVASE fitting
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83648
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83648

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