Doping dependence of optical properties of solid-phase crystallized evaporated poly-Si thin films on glass

• Main Authors: He, S., Sproul, A.B., Aberle, A.G.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Absorption coefficient; Boron, phosphorous; Evaporated poly-si films; Refractive index; Solid phase crystallization; Tauc-lorentz model; Thin films; WVASE fitting
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83648
• Institution: National University of Singapore

10.1109/COMMAD.2008.4802150