Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure

10.1016/j.tsf.2005.09.043

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Bibliographic Details
Main Authors:	Gao, F., Lee, S.J., Balakumar, S., Du, A., Foo, Y.-L., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	GOI MOSFET SiGe Solid phase epitaxy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83757
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83757
record_format	dspace
spelling	sg-nus-scholar.10635-837572024-11-10T21:13:30Z Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure Gao, F. Lee, S.J. Balakumar, S. Du, A. Foo, Y.-L. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING GOI MOSFET SiGe Solid phase epitaxy 10.1016/j.tsf.2005.09.043 Thin Solid Films 504 1-2 69-72 THSFA 2014-10-07T04:44:49Z 2014-10-07T04:44:49Z 2006-05-10 Conference Paper Gao, F., Lee, S.J., Balakumar, S., Du, A., Foo, Y.-L., Kwong, D.-L. (2006-05-10). Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure. Thin Solid Films 504 (1-2) : 69-72. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2005.09.043 00406090 http://scholarbank.nus.edu.sg/handle/10635/83757 000236486200017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	GOI MOSFET SiGe Solid phase epitaxy
spellingShingle	GOI MOSFET SiGe Solid phase epitaxy Gao, F. Lee, S.J. Balakumar, S. Du, A. Foo, Y.-L. Kwong, D.-L. Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
description	10.1016/j.tsf.2005.09.043
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Gao, F. Lee, S.J. Balakumar, S. Du, A. Foo, Y.-L. Kwong, D.-L.
format	Conference or Workshop Item
author	Gao, F. Lee, S.J. Balakumar, S. Du, A. Foo, Y.-L. Kwong, D.-L.
author_sort	Gao, F.
title	Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
title_short	Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
title_full	Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
title_fullStr	Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
title_full_unstemmed	Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
title_sort	ge diffusion and solid phase epitaxy growth to form si 1 - xgex/si and ge on insulator structure
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83757
_version_	1821216684796542976

Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure

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