Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure

Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure

10.1016/j.tsf.2005.09.043

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Bibliographic Details
Main Authors: Gao, F., Lee, S.J., Balakumar, S., Du, A., Foo, Y.-L., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
GOI
MOSFET
SiGe
Solid phase epitaxy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83757
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Institution: National University of Singapore

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