Optimal geometry for GeSi/Si super-lattice structure RBS investigation

Optimal geometry for GeSi/Si super-lattice structure RBS investigation

10.1016/S0168-583X(01)01218-6

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Bibliographic Details
Main Authors: Wielunski, L.S., Osipowicz, T., Teo, E.J., Watt, F., Tok, E.S., Zhang, J.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Channeling
Depth resolution
GeSi/Si super-lattice
Glancing angle detection
He RBS
Muliple scattering
Online Access:http://scholarbank.nus.edu.sg/handle/10635/77474
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/77474

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