Optimal geometry for GeSi/Si super-lattice structure RBS investigation
10.1016/S0168-583X(01)01218-6
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2014
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sg-nus-scholar.10635-774742023-10-31T20:17:21Z Optimal geometry for GeSi/Si super-lattice structure RBS investigation Wielunski, L.S. Osipowicz, T. Teo, E.J. Watt, F. Tok, E.S. Zhang, J. PHYSICS CHEMISTRY MATERIALS SCIENCE Channeling Depth resolution GeSi/Si super-lattice Glancing angle detection He RBS Muliple scattering 10.1016/S0168-583X(01)01218-6 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 1-4 414-418 NIMBE 2014-06-23T05:55:31Z 2014-06-23T05:55:31Z 2002-05 Conference Paper Wielunski, L.S., Osipowicz, T., Teo, E.J., Watt, F., Tok, E.S., Zhang, J. (2002-05). Optimal geometry for GeSi/Si super-lattice structure RBS investigation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 (1-4) : 414-418. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)01218-6 0168583X http://scholarbank.nus.edu.sg/handle/10635/77474 000176108800082 Scopus |
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National University of Singapore |
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Singapore Singapore |
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Channeling Depth resolution GeSi/Si super-lattice Glancing angle detection He RBS Muliple scattering |
| spellingShingle |
Channeling Depth resolution GeSi/Si super-lattice Glancing angle detection He RBS Muliple scattering Wielunski, L.S. Osipowicz, T. Teo, E.J. Watt, F. Tok, E.S. Zhang, J. Optimal geometry for GeSi/Si super-lattice structure RBS investigation |
| description |
10.1016/S0168-583X(01)01218-6 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Wielunski, L.S. Osipowicz, T. Teo, E.J. Watt, F. Tok, E.S. Zhang, J. |
| format |
Conference or Workshop Item |
| author |
Wielunski, L.S. Osipowicz, T. Teo, E.J. Watt, F. Tok, E.S. Zhang, J. |
| author_sort |
Wielunski, L.S. |
| title |
Optimal geometry for GeSi/Si super-lattice structure RBS investigation |
| title_short |
Optimal geometry for GeSi/Si super-lattice structure RBS investigation |
| title_full |
Optimal geometry for GeSi/Si super-lattice structure RBS investigation |
| title_fullStr |
Optimal geometry for GeSi/Si super-lattice structure RBS investigation |
| title_full_unstemmed |
Optimal geometry for GeSi/Si super-lattice structure RBS investigation |
| title_sort |
optimal geometry for gesi/si super-lattice structure rbs investigation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/77474 |
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1781783774787272704 |