High density RF MIM capacitors using high-κ AlTaOx dielectrics

• Main Authors: Huang, C.H., Yang, M.Y., Chin, A., Zhu, C., Li, M.F., Kwong, D.-L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83777
• Institution: National University of Singapore

IEEE MTT-S International Microwave Symposium Digest