High density RF MIM capacitors using high-κ AlTaOx dielectrics

IEEE MTT-S International Microwave Symposium Digest

Saved in:

Bibliographic Details
Main Authors:	Huang, C.H., Yang, M.Y., Chin, A., Zhu, C., Li, M.F., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83777
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-83777
record_format	dspace
spelling	sg-nus-scholar.10635-837772015-01-09T13:04:54Z High density RF MIM capacitors using high-κ AlTaOx dielectrics Huang, C.H. Yang, M.Y. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING IEEE MTT-S International Microwave Symposium Digest 1 507-510 IMIDD 2014-10-07T04:45:04Z 2014-10-07T04:45:04Z 2003 Conference Paper Huang, C.H.,Yang, M.Y.,Chin, A.,Zhu, C.,Li, M.F.,Kwong, D.-L. (2003). High density RF MIM capacitors using high-κ AlTaOx dielectrics. IEEE MTT-S International Microwave Symposium Digest 1 : 507-510. ScholarBank@NUS Repository. 0149645X http://scholarbank.nus.edu.sg/handle/10635/83777 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	IEEE MTT-S International Microwave Symposium Digest
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Huang, C.H. Yang, M.Y. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L.
format	Conference or Workshop Item
author	Huang, C.H. Yang, M.Y. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L.
spellingShingle	Huang, C.H. Yang, M.Y. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L. High density RF MIM capacitors using high-κ AlTaOx dielectrics
author_sort	Huang, C.H.
title	High density RF MIM capacitors using high-κ AlTaOx dielectrics
title_short	High density RF MIM capacitors using high-κ AlTaOx dielectrics
title_full	High density RF MIM capacitors using high-κ AlTaOx dielectrics
title_fullStr	High density RF MIM capacitors using high-κ AlTaOx dielectrics
title_full_unstemmed	High density RF MIM capacitors using high-κ AlTaOx dielectrics
title_sort	high density rf mim capacitors using high-κ altaox dielectrics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83777
_version_	1681089498343014400

High density RF MIM capacitors using high-κ AlTaOx dielectrics

Similar Items