Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator
10.1016/j.proeng.2011.12.173
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2014
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sg-nus-scholar.10635-838612023-10-25T20:07:48Z Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator Koh, K.H. Kobayashi, T. Liu, H. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Micro-electro-mechanical systems (MEMS) Optical MEMS Piezoelectric actuator PZT 10.1016/j.proeng.2011.12.173 Procedia Engineering 25 701-704 2014-10-07T04:46:02Z 2014-10-07T04:46:02Z 2011 Conference Paper Koh, K.H., Kobayashi, T., Liu, H., Lee, C. (2011). Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator. Procedia Engineering 25 : 701-704. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.173 18777058 http://scholarbank.nus.edu.sg/handle/10635/83861 000300512400170 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Micro-electro-mechanical systems (MEMS) Optical MEMS Piezoelectric actuator PZT |
| spellingShingle |
Micro-electro-mechanical systems (MEMS) Optical MEMS Piezoelectric actuator PZT Koh, K.H. Kobayashi, T. Liu, H. Lee, C. Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| description |
10.1016/j.proeng.2011.12.173 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Liu, H. Lee, C. |
| format |
Conference or Workshop Item |
| author |
Koh, K.H. Kobayashi, T. Liu, H. Lee, C. |
| author_sort |
Koh, K.H. |
| title |
Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| title_short |
Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| title_full |
Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| title_fullStr |
Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| title_full_unstemmed |
Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator |
| title_sort |
investigation of a piezoelectric driven mems mirror based on single s-shaped pzt actuator |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83861 |
| _version_ |
1781784398916485120 |