Laser chemical processing (LCP) of poly-silicon thin film on glass substrates

• Main Authors: Virasawmy, S., Palina, N., Chakraborty, S., Widenborg, P.I., Hoex, B., Aberle, A.G.
• Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Doping; Laser chemical processing; Poly-silicon thin film
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83885
• Institution: National University of Singapore

10.1016/j.egypro.2013.05.050