Laser chemical processing (LCP) of poly-silicon thin film on glass substrates

Laser chemical processing (LCP) of poly-silicon thin film on glass substrates

10.1016/j.egypro.2013.05.050

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Bibliographic Details
Main Authors: Virasawmy, S., Palina, N., Chakraborty, S., Widenborg, P.I., Hoex, B., Aberle, A.G.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Doping
Laser chemical processing
Poly-silicon thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83885
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Institution: National University of Singapore

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