Low temperature poly-germanium growth process on insulating substrate using palladium-induced lateral crystallization

Low temperature poly-germanium growth process on insulating substrate using palladium-induced lateral crystallization

10.1109/ICSICT.2008.4734651

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Bibliographic Details
Main Authors: Xie, R., Chen, W., Mingbin, Y., Ann, O.S., Tripathy, S., Zhu, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83907
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Institution: National University of Singapore
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Summary:10.1109/ICSICT.2008.4734651

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