Low temperature poly-germanium growth process on insulating substrate using palladium-induced lateral crystallization

• Main Authors: Xie, R., Chen, W., Mingbin, Y., Ann, O.S., Tripathy, S., Zhu, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83907
• Institution: National University of Singapore

10.1109/ICSICT.2008.4734651