MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications

MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Yu, X., Zhu, C., Hu, H., Chin, A., Li, M.F., Cho, B.J., Kwong, D.-L., Foo, P.D., Yu, M.B.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83953
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-839532015-01-07T11:07:28Z MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications Yu, X. Zhu, C. Hu, H. Chin, A. Li, M.F. Cho, B.J. Kwong, D.-L. Foo, P.D. Yu, M.B. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 766 357-362 MRSPD 2014-10-07T04:47:06Z 2014-10-07T04:47:06Z 2003 Conference Paper Yu, X.,Zhu, C.,Hu, H.,Chin, A.,Li, M.F.,Cho, B.J.,Kwong, D.-L.,Foo, P.D.,Yu, M.B. (2003). MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications. Materials Research Society Symposium - Proceedings 766 : 357-362. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/83953 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yu, X.
Zhu, C.
Hu, H.
Chin, A.
Li, M.F.
Cho, B.J.
Kwong, D.-L.
Foo, P.D.
Yu, M.B.
format Conference or Workshop Item
author Yu, X.
Zhu, C.
Hu, H.
Chin, A.
Li, M.F.
Cho, B.J.
Kwong, D.-L.
Foo, P.D.
Yu, M.B.
spellingShingle Yu, X.
Zhu, C.
Hu, H.
Chin, A.
Li, M.F.
Cho, B.J.
Kwong, D.-L.
Foo, P.D.
Yu, M.B.
MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
author_sort Yu, X.
title MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
title_short MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
title_full MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
title_fullStr MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
title_full_unstemmed MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
title_sort mim capacitors with hfo2 and hfalox for si rf and analog applications
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83953
_version_ 1681089530238599168

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