A high performance MIM capacitor using HfO 2 dielectrics

A high performance MIM capacitor using HfO 2 dielectrics

10.1109/LED.2002.802602

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Bibliographic Details
Main Authors: Hu, H., Zhu, C., Lu, Y.F., Li, M.F., Cho, B.J., Choi, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
High-κ
MIM capacitor
Temperature coefficient
Thin-film devices
Voltage linearity
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81872
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/81872

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