A high performance MIM capacitor using HfO 2 dielectrics

A high performance MIM capacitor using HfO 2 dielectrics

10.1109/LED.2002.802602

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Bibliographic Details
Main Authors: Hu, H., Zhu, C., Lu, Y.F., Li, M.F., Cho, B.J., Choi, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
High-κ
MIM capacitor
Temperature coefficient
Thin-film devices
Voltage linearity
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81872
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Institution: National University of Singapore
id sg-nus-scholar.10635-81872
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spelling sg-nus-scholar.10635-818722023-10-30T08:07:59Z A high performance MIM capacitor using HfO 2 dielectrics Hu, H. Zhu, C. Lu, Y.F. Li, M.F. Cho, B.J. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING High-κ MIM capacitor Temperature coefficient Thin-film devices Voltage linearity 10.1109/LED.2002.802602 IEEE Electron Device Letters 23 9 514-516 EDLED 2014-10-07T04:22:42Z 2014-10-07T04:22:42Z 2002-09 Article Hu, H., Zhu, C., Lu, Y.F., Li, M.F., Cho, B.J., Choi, W.K. (2002-09). A high performance MIM capacitor using HfO 2 dielectrics. IEEE Electron Device Letters 23 (9) : 514-516. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2002.802602 07413106 http://scholarbank.nus.edu.sg/handle/10635/81872 000177748500004 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic High-κ
MIM capacitor
Temperature coefficient
Thin-film devices
Voltage linearity
spellingShingle High-κ
MIM capacitor
Temperature coefficient
Thin-film devices
Voltage linearity
Hu, H.
Zhu, C.
Lu, Y.F.
Li, M.F.
Cho, B.J.
Choi, W.K.
A high performance MIM capacitor using HfO 2 dielectrics
description 10.1109/LED.2002.802602
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Hu, H.
Zhu, C.
Lu, Y.F.
Li, M.F.
Cho, B.J.
Choi, W.K.
format Article
author Hu, H.
Zhu, C.
Lu, Y.F.
Li, M.F.
Cho, B.J.
Choi, W.K.
author_sort Hu, H.
title A high performance MIM capacitor using HfO 2 dielectrics
title_short A high performance MIM capacitor using HfO 2 dielectrics
title_full A high performance MIM capacitor using HfO 2 dielectrics
title_fullStr A high performance MIM capacitor using HfO 2 dielectrics
title_full_unstemmed A high performance MIM capacitor using HfO 2 dielectrics
title_sort high performance mim capacitor using hfo 2 dielectrics
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81872
_version_ 1781784003844505600

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