Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube

Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube

10.1109/DRC.2013.6633876

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Bibliographic Details
Main Authors: Huang, W., Yu, X., Comberiate, T., Qiu, C.-W., Schutt-Aine, J.E., Li, X.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83956
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83956

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