Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube
10.1109/DRC.2013.6633876
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Main Authors: | Huang, W., Yu, X., Comberiate, T., Qiu, C.-W., Schutt-Aine, J.E., Li, X. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83956 |
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Institution: | National University of Singapore |
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