Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube

• Main Authors: Huang, W., Yu, X., Comberiate, T., Qiu, C.-W., Schutt-Aine, J.E., Li, X.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83956
• Institution: National University of Singapore

10.1109/DRC.2013.6633876