Mortality dependence of Cu dual damascene interconnects on adjacent segment

Materials Research Society Symposium Proceedings

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Bibliographic Details
Main Authors:	Chang, C.W., Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K., Hwang, N.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83978
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83978
record_format	dspace
spelling	sg-nus-scholar.10635-839782024-11-09T00:15:50Z Mortality dependence of Cu dual damascene interconnects on adjacent segment Chang, C.W. Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Hwang, N. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium Proceedings 812 339-344 MRSPD 2014-10-07T04:47:23Z 2014-10-07T04:47:23Z 2004 Conference Paper Chang, C.W.,Gan, C.L.,Thompson, C.V.,Pey, K.L.,Choi, W.K.,Hwang, N. (2004). Mortality dependence of Cu dual damascene interconnects on adjacent segment. Materials Research Society Symposium Proceedings 812 : 339-344. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/83978 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Materials Research Society Symposium Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chang, C.W. Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Hwang, N.
format	Conference or Workshop Item
author	Chang, C.W. Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Hwang, N.
spellingShingle	Chang, C.W. Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Hwang, N. Mortality dependence of Cu dual damascene interconnects on adjacent segment
author_sort	Chang, C.W.
title	Mortality dependence of Cu dual damascene interconnects on adjacent segment
title_short	Mortality dependence of Cu dual damascene interconnects on adjacent segment
title_full	Mortality dependence of Cu dual damascene interconnects on adjacent segment
title_fullStr	Mortality dependence of Cu dual damascene interconnects on adjacent segment
title_full_unstemmed	Mortality dependence of Cu dual damascene interconnects on adjacent segment
title_sort	mortality dependence of cu dual damascene interconnects on adjacent segment
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83978
_version_	1821225396245364736

Mortality dependence of Cu dual damascene interconnects on adjacent segment

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