Oxidation study of hydrogenated amorphous silicon carbide films
Materials Research Society Symposium - Proceedings
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2014
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sg-nus-scholar.10635-840642024-11-09T00:15:51Z Oxidation study of hydrogenated amorphous silicon carbide films Choi, W.K. Lee, L.P. Leoy, C.C. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 640 H5.15.1-H5.15.6 MRSPD 2014-10-07T04:48:23Z 2014-10-07T04:48:23Z 2001 Conference Paper Choi, W.K.,Lee, L.P.,Leoy, C.C. (2001). Oxidation study of hydrogenated amorphous silicon carbide films. Materials Research Society Symposium - Proceedings 640 : H5.15.1-H5.15.6. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/84064 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Choi, W.K. Lee, L.P. Leoy, C.C. |
| format |
Conference or Workshop Item |
| author |
Choi, W.K. Lee, L.P. Leoy, C.C. |
| spellingShingle |
Choi, W.K. Lee, L.P. Leoy, C.C. Oxidation study of hydrogenated amorphous silicon carbide films |
| author_sort |
Choi, W.K. |
| title |
Oxidation study of hydrogenated amorphous silicon carbide films |
| title_short |
Oxidation study of hydrogenated amorphous silicon carbide films |
| title_full |
Oxidation study of hydrogenated amorphous silicon carbide films |
| title_fullStr |
Oxidation study of hydrogenated amorphous silicon carbide films |
| title_full_unstemmed |
Oxidation study of hydrogenated amorphous silicon carbide films |
| title_sort |
oxidation study of hydrogenated amorphous silicon carbide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84064 |
| _version_ |
1821224910150696960 |