Study of activation of beryllium implantation in gallium nitride

10.1016/j.jcrysgro.2004.04.078

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Bibliographic Details
Main Authors:	Wang, H.T., Tan, L.S., Chor, E.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	A1. Hall measurement A1. Photoluminescence A1. Pulsed laser annealing A1. Rapid thermal annealing B1. Beryllium implantation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84244
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84244
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spelling	sg-nus-scholar.10635-842442023-10-30T22:53:00Z Study of activation of beryllium implantation in gallium nitride Wang, H.T. Tan, L.S. Chor, E.F. ELECTRICAL & COMPUTER ENGINEERING A1. Hall measurement A1. Photoluminescence A1. Pulsed laser annealing A1. Rapid thermal annealing B1. Beryllium implantation 10.1016/j.jcrysgro.2004.04.078 Journal of Crystal Growth 268 3-4 SPEC. ISS. 489-493 JCRGA 2014-10-07T04:50:27Z 2014-10-07T04:50:27Z 2004-08-01 Conference Paper Wang, H.T., Tan, L.S., Chor, E.F. (2004-08-01). Study of activation of beryllium implantation in gallium nitride. Journal of Crystal Growth 268 (3-4 SPEC. ISS.) : 489-493. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jcrysgro.2004.04.078 00220248 http://scholarbank.nus.edu.sg/handle/10635/84244 000223087000029 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	A1. Hall measurement A1. Photoluminescence A1. Pulsed laser annealing A1. Rapid thermal annealing B1. Beryllium implantation
spellingShingle	A1. Hall measurement A1. Photoluminescence A1. Pulsed laser annealing A1. Rapid thermal annealing B1. Beryllium implantation Wang, H.T. Tan, L.S. Chor, E.F. Study of activation of beryllium implantation in gallium nitride
description	10.1016/j.jcrysgro.2004.04.078
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, H.T. Tan, L.S. Chor, E.F.
format	Conference or Workshop Item
author	Wang, H.T. Tan, L.S. Chor, E.F.
author_sort	Wang, H.T.
title	Study of activation of beryllium implantation in gallium nitride
title_short	Study of activation of beryllium implantation in gallium nitride
title_full	Study of activation of beryllium implantation in gallium nitride
title_fullStr	Study of activation of beryllium implantation in gallium nitride
title_full_unstemmed	Study of activation of beryllium implantation in gallium nitride
title_sort	study of activation of beryllium implantation in gallium nitride
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84244
_version_	1781784435176243200

Study of activation of beryllium implantation in gallium nitride

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