Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering

Materials Research Society Symposium - Proceedings

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Main Authors:	Qiu, J., Li, K., Han, G., Guo, Z., Wu, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84262
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84262
record_format	dspace
spelling	sg-nus-scholar.10635-842622024-11-11T13:18:38Z Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y. ELECTRICAL & COMPUTER ENGINEERING PHYSICS Materials Research Society Symposium - Proceedings 672 O8.36.1-O8.36.6 MRSPD 2014-10-07T04:50:40Z 2014-10-07T04:50:40Z 2001 Conference Paper Qiu, J.,Li, K.,Han, G.,Guo, Z.,Wu, Y. (2001). Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering. Materials Research Society Symposium - Proceedings 672 : O8.36.1-O8.36.6. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/84262 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y.
format	Conference or Workshop Item
author	Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y.
spellingShingle	Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y. Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
author_sort	Qiu, J.
title	Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
title_short	Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
title_full	Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
title_fullStr	Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
title_full_unstemmed	Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
title_sort	surface roughness control of the al and al2o3 thin films deposited by using pulsed dc magnetron sputtering
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84262
_version_	1821209104223305728

Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering

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