Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering
Materials Research Society Symposium - Proceedings
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2014
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sg-nus-scholar.10635-842622015-01-07T06:38:28Z Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y. PHYSICS ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 672 O8.36.1-O8.36.6 MRSPD 2014-10-07T04:50:40Z 2014-10-07T04:50:40Z 2001 Conference Paper Qiu, J.,Li, K.,Han, G.,Guo, Z.,Wu, Y. (2001). Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering. Materials Research Society Symposium - Proceedings 672 : O8.36.1-O8.36.6. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/84262 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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| description |
Materials Research Society Symposium - Proceedings |
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PHYSICS |
| author_facet |
PHYSICS Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y. |
| format |
Conference or Workshop Item |
| author |
Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y. |
| spellingShingle |
Qiu, J. Li, K. Han, G. Guo, Z. Wu, Y. Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering |
| author_sort |
Qiu, J. |
| title |
Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering |
| title_short |
Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering |
| title_full |
Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering |
| title_fullStr |
Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering |
| title_full_unstemmed |
Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering |
| title_sort |
surface roughness control of the al and al2o3 thin films deposited by using pulsed dc magnetron sputtering |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84262 |
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1681089586239897600 |