Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering

Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Qiu, J., Li, K., Han, G., Guo, Z., Wu, Y.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84262
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Institution: National University of Singapore
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