Analysis of highly doping with boron from spin-on diffusing source

Analysis of highly doping with boron from spin-on diffusing source

10.1016/j.surfcoat.2004.10.093

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Bibliographic Details
Main Authors: Iliescu, C., Carp, M., Miao, J., Tay, F.E.H., Poenar, D.P.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Highly boron doping
Roughness
Spin-on diffusant
Stress
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84873
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-848732023-10-27T09:36:47Z Analysis of highly doping with boron from spin-on diffusing source Iliescu, C. Carp, M. Miao, J. Tay, F.E.H. Poenar, D.P. MECHANICAL ENGINEERING Highly boron doping Roughness Spin-on diffusant Stress 10.1016/j.surfcoat.2004.10.093 Surface and Coatings Technology 198 1-3 SPEC. ISS. 309-313 2014-10-07T09:01:16Z 2014-10-07T09:01:16Z 2005-08-01 Article Iliescu, C., Carp, M., Miao, J., Tay, F.E.H., Poenar, D.P. (2005-08-01). Analysis of highly doping with boron from spin-on diffusing source. Surface and Coatings Technology 198 (1-3 SPEC. ISS.) : 309-313. ScholarBank@NUS Repository. https://doi.org/10.1016/j.surfcoat.2004.10.093 02578972 http://scholarbank.nus.edu.sg/handle/10635/84873 000230419400065 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Highly boron doping
Roughness
Spin-on diffusant
Stress
spellingShingle Highly boron doping
Roughness
Spin-on diffusant
Stress
Iliescu, C.
Carp, M.
Miao, J.
Tay, F.E.H.
Poenar, D.P.
Analysis of highly doping with boron from spin-on diffusing source
description 10.1016/j.surfcoat.2004.10.093
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Iliescu, C.
Carp, M.
Miao, J.
Tay, F.E.H.
Poenar, D.P.
format Article
author Iliescu, C.
Carp, M.
Miao, J.
Tay, F.E.H.
Poenar, D.P.
author_sort Iliescu, C.
title Analysis of highly doping with boron from spin-on diffusing source
title_short Analysis of highly doping with boron from spin-on diffusing source
title_full Analysis of highly doping with boron from spin-on diffusing source
title_fullStr Analysis of highly doping with boron from spin-on diffusing source
title_full_unstemmed Analysis of highly doping with boron from spin-on diffusing source
title_sort analysis of highly doping with boron from spin-on diffusing source
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84873
_version_ 1781784527288401920

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