Analysis of highly doping with boron from spin-on diffusing source

• Main Authors: Iliescu, C., Carp, M., Miao, J., Tay, F.E.H., Poenar, D.P.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Highly boron doping; Roughness; Spin-on diffusant; Stress
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84873
• Institution: National University of Singapore

10.1016/j.surfcoat.2004.10.093