Analysis of highly doping with boron from spin-on diffusing source

Analysis of highly doping with boron from spin-on diffusing source

10.1016/j.surfcoat.2004.10.093

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Bibliographic Details
Main Authors: Iliescu, C., Carp, M., Miao, J., Tay, F.E.H., Poenar, D.P.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Highly boron doping
Roughness
Spin-on diffusant
Stress
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84873
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/84873

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