Direct laser doping of poly-silicon thin films via laser chemical processing

10.1109/JPHOTOV.2013.2278662

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Bibliographic Details
Main Authors:	Virasawmy, S., Palina, N., Widenborg, P.I., Kumar, A., Dalapati, G.K., Tan, H.R., Tay, A.A.O., Hoex, B.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2014
Subjects:	Laser chemical processing (LCP) laser doping Nd:YAG poly-silicon thin film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85011
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85011
record_format	dspace
spelling	sg-nus-scholar.10635-850112023-10-27T08:32:38Z Direct laser doping of poly-silicon thin films via laser chemical processing Virasawmy, S. Palina, N. Widenborg, P.I. Kumar, A. Dalapati, G.K. Tan, H.R. Tay, A.A.O. Hoex, B. SOLAR ENERGY RESEARCH INST OF S'PORE MECHANICAL ENGINEERING Laser chemical processing (LCP) laser doping Nd:YAG poly-silicon thin film 10.1109/JPHOTOV.2013.2278662 IEEE Journal of Photovoltaics 3 4 1259-1264 2014-10-07T09:02:56Z 2014-10-07T09:02:56Z 2013 Article Virasawmy, S., Palina, N., Widenborg, P.I., Kumar, A., Dalapati, G.K., Tan, H.R., Tay, A.A.O., Hoex, B. (2013). Direct laser doping of poly-silicon thin films via laser chemical processing. IEEE Journal of Photovoltaics 3 (4) : 1259-1264. ScholarBank@NUS Repository. https://doi.org/10.1109/JPHOTOV.2013.2278662 21563381 http://scholarbank.nus.edu.sg/handle/10635/85011 000324881400019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser chemical processing (LCP) laser doping Nd:YAG poly-silicon thin film
spellingShingle	Laser chemical processing (LCP) laser doping Nd:YAG poly-silicon thin film Virasawmy, S. Palina, N. Widenborg, P.I. Kumar, A. Dalapati, G.K. Tan, H.R. Tay, A.A.O. Hoex, B. Direct laser doping of poly-silicon thin films via laser chemical processing
description	10.1109/JPHOTOV.2013.2278662
author2	SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet	SOLAR ENERGY RESEARCH INST OF S'PORE Virasawmy, S. Palina, N. Widenborg, P.I. Kumar, A. Dalapati, G.K. Tan, H.R. Tay, A.A.O. Hoex, B.
format	Article
author	Virasawmy, S. Palina, N. Widenborg, P.I. Kumar, A. Dalapati, G.K. Tan, H.R. Tay, A.A.O. Hoex, B.
author_sort	Virasawmy, S.
title	Direct laser doping of poly-silicon thin films via laser chemical processing
title_short	Direct laser doping of poly-silicon thin films via laser chemical processing
title_full	Direct laser doping of poly-silicon thin films via laser chemical processing
title_fullStr	Direct laser doping of poly-silicon thin films via laser chemical processing
title_full_unstemmed	Direct laser doping of poly-silicon thin films via laser chemical processing
title_sort	direct laser doping of poly-silicon thin films via laser chemical processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85011
_version_	1781784559729246208

Direct laser doping of poly-silicon thin films via laser chemical processing

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