Direct laser doping of poly-silicon thin films via laser chemical processing

Direct laser doping of poly-silicon thin films via laser chemical processing

10.1109/JPHOTOV.2013.2278662

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Bibliographic Details
Main Authors: Virasawmy, S., Palina, N., Widenborg, P.I., Kumar, A., Dalapati, G.K., Tan, H.R., Tay, A.A.O., Hoex, B.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Article
Published: 2014
Subjects:
Laser chemical processing (LCP)
laser doping
Nd:YAG
poly-silicon thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85011
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Institution: National University of Singapore

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