Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor

10.1088/0957-4484/23/31/315304

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Main Authors:	Ganesan, R., Dinachali, S.S., Lim, S.H., Saifullah, M.S.M., Chong, W.T., Lim, A.H.H., Yong, J.J., Thian, E.S., He, C., Low, H.Y.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85012
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-850122024-11-15T05:14:08Z Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor Ganesan, R. Dinachali, S.S. Lim, S.H. Saifullah, M.S.M. Chong, W.T. Lim, A.H.H. Yong, J.J. Thian, E.S. He, C. Low, H.Y. MECHANICAL ENGINEERING MATERIALS SCIENCE AND ENGINEERING 10.1088/0957-4484/23/31/315304 Nanotechnology 23 31 - NNOTE 2014-10-07T09:02:57Z 2014-10-07T09:02:57Z 2012-08-10 Article Ganesan, R., Dinachali, S.S., Lim, S.H., Saifullah, M.S.M., Chong, W.T., Lim, A.H.H., Yong, J.J., Thian, E.S., He, C., Low, H.Y. (2012-08-10). Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor. Nanotechnology 23 (31) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/23/31/315304 09574484 http://scholarbank.nus.edu.sg/handle/10635/85012 000306516100008 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0957-4484/23/31/315304
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Ganesan, R. Dinachali, S.S. Lim, S.H. Saifullah, M.S.M. Chong, W.T. Lim, A.H.H. Yong, J.J. Thian, E.S. He, C. Low, H.Y.
format	Article
author	Ganesan, R. Dinachali, S.S. Lim, S.H. Saifullah, M.S.M. Chong, W.T. Lim, A.H.H. Yong, J.J. Thian, E.S. He, C. Low, H.Y.
spellingShingle	Ganesan, R. Dinachali, S.S. Lim, S.H. Saifullah, M.S.M. Chong, W.T. Lim, A.H.H. Yong, J.J. Thian, E.S. He, C. Low, H.Y. Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
author_sort	Ganesan, R.
title	Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
title_short	Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
title_full	Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
title_fullStr	Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
title_full_unstemmed	Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor
title_sort	direct nanoimprint lithography of al 2o 3 using a chelated monomer-based precursor
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85012
_version_	1821216946276794368

Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor

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