Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films

Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films

10.1021/la0344074

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Bibliographic Details
Main Authors: Li, H., Sharma, R.K., Zhang, Y., Tay, A.A.O., Kang, E.T., Neoh, K.G.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85707
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Institution: National University of Singapore
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Summary:10.1021/la0344074

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