Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films

10.1021/la0344074

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Bibliographic Details
Main Authors: Li, H., Sharma, R.K., Zhang, Y., Tay, A.A.O., Kang, E.T., Neoh, K.G.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85707
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-857072024-11-13T13:23:03Z Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films Li, H. Sharma, R.K. Zhang, Y. Tay, A.A.O. Kang, E.T. Neoh, K.G. CHEMICAL & ENVIRONMENTAL ENGINEERING MECHANICAL ENGINEERING 10.1021/la0344074 Langmuir 19 17 6845-6850 LANGD 2014-10-07T09:11:11Z 2014-10-07T09:11:11Z 2003-08-19 Article Li, H., Sharma, R.K., Zhang, Y., Tay, A.A.O., Kang, E.T., Neoh, K.G. (2003-08-19). Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films. Langmuir 19 (17) : 6845-6850. ScholarBank@NUS Repository. https://doi.org/10.1021/la0344074 07437463 http://scholarbank.nus.edu.sg/handle/10635/85707 000184768600044 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1021/la0344074
author2 CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet CHEMICAL & ENVIRONMENTAL ENGINEERING
Li, H.
Sharma, R.K.
Zhang, Y.
Tay, A.A.O.
Kang, E.T.
Neoh, K.G.
format Article
author Li, H.
Sharma, R.K.
Zhang, Y.
Tay, A.A.O.
Kang, E.T.
Neoh, K.G.
spellingShingle Li, H.
Sharma, R.K.
Zhang, Y.
Tay, A.A.O.
Kang, E.T.
Neoh, K.G.
Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
author_sort Li, H.
title Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
title_short Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
title_full Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
title_fullStr Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
title_full_unstemmed Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
title_sort surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85707
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