Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films
10.1021/la0344074
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sg-nus-scholar.10635-857072024-11-13T13:23:03Z Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films Li, H. Sharma, R.K. Zhang, Y. Tay, A.A.O. Kang, E.T. Neoh, K.G. CHEMICAL & ENVIRONMENTAL ENGINEERING MECHANICAL ENGINEERING 10.1021/la0344074 Langmuir 19 17 6845-6850 LANGD 2014-10-07T09:11:11Z 2014-10-07T09:11:11Z 2003-08-19 Article Li, H., Sharma, R.K., Zhang, Y., Tay, A.A.O., Kang, E.T., Neoh, K.G. (2003-08-19). Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films. Langmuir 19 (17) : 6845-6850. ScholarBank@NUS Repository. https://doi.org/10.1021/la0344074 07437463 http://scholarbank.nus.edu.sg/handle/10635/85707 000184768600044 Scopus |
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10.1021/la0344074 |
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CHEMICAL & ENVIRONMENTAL ENGINEERING |
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CHEMICAL & ENVIRONMENTAL ENGINEERING Li, H. Sharma, R.K. Zhang, Y. Tay, A.A.O. Kang, E.T. Neoh, K.G. |
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Li, H. Sharma, R.K. Zhang, Y. Tay, A.A.O. Kang, E.T. Neoh, K.G. |
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Li, H. Sharma, R.K. Zhang, Y. Tay, A.A.O. Kang, E.T. Neoh, K.G. Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
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Li, H. |
title |
Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
title_short |
Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
title_full |
Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
title_fullStr |
Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
title_full_unstemmed |
Surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
title_sort |
surface modification of polyimide films via plasma-enhanced chemical vapor deposition of thin silica and nitride films |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/85707 |
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